Aehr Test Systems has been granted a patent for a tester apparatus featuring removable slot assemblies that enable individual heating and temperature control of cartridges. The design allows for simultaneous testing of multiple microelectronic devices, with integrated temperature modification and performance measurement capabilities. GlobalData’s report on Aehr Test Systems gives a 360-degree view of the company including its patenting strategy. Buy the report here.
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According to GlobalData’s company profile on Aehr Test Systems, 3D memory devices was a key innovation area identified from patents. Aehr Test Systems's grant share as of June 2024 was 61%. Grant share is based on the ratio of number of grants to total number of patents.
Tester apparatus for microelectronic device temperature control and testing
The granted patent US12007451B2 describes a sophisticated tester apparatus designed for evaluating microelectronic devices on wafers. The apparatus features a frame that supports multiple slot assemblies, each equipped with a holder for placing a wafer, electrical conductors for power supply, and a temperature detector to monitor the wafer's temperature. A key innovation is the inclusion of temperature modification devices that can transfer heat to or from the wafers, allowing for precise thermal management during testing. The design enables simultaneous testing of multiple wafers, with the capability to connect conductors between different wafers while managing their thermal conditions.
Additionally, the patent outlines a method for testing microelectronic devices that involves placing wafers in designated testing stations, detecting their temperatures, and adjusting heat transfer as needed. Each slot assembly is equipped with thermal controllers and vacuum interfaces to ensure optimal contact between the wafer and the testing apparatus. The method emphasizes the importance of maintaining proper thermal conditions and electrical connections, facilitating accurate performance measurements of the microelectronic devices. Overall, this patent presents a comprehensive solution for enhancing the efficiency and effectiveness of microelectronic device testing.
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GlobalData Patent Analytics tracks bibliographic data, legal events data, point in time patent ownerships, and backward and forward citations from global patenting offices. Textual analysis and official patent classifications are used to group patents into key thematic areas and link them to specific companies across the world’s largest industries.
