Applied Materials had 22 patents in big data during Q1 2024. The patents filed by Applied Materials Inc in Q1 2024 focus on improving 3D memory structures, detecting edge defects in substrate processing systems, non-destructive z-profiling of samples, and forming semiconductor memory devices with high aspect ratio structures. These innovations involve techniques such as passivating polysilicon channels, using image analytics for defect detection, measuring optical emission data sets, and filling HAR structures with sacrificial layers. GlobalData’s report on Applied Materials gives a 360-degree view of the company including its patenting strategy. Buy the report here.

Applied Materials grant share with big data as a theme is 22% in Q1 2024. Grant share is based on the ratio of number of grants to total number of patents.

Recent Patents

Application: Integration approach for increase of the mobility and on-current in 3d nand cells (Patent ID: US20240107764A1)

The patent filed by Applied Materials Inc. describes an apparatus and method for improving the structure of a three-dimensional memory device, specifically a 3D NAND device, by passivating and removing defects in the polysilicon channel. This is achieved through the deposition of a fluorine-containing layer with high concentrations of fluorine and hydrogen atoms, followed by annealing steps in hydrogen or deuterium environments to load the polysilicon layer with these atoms.

The patent includes claims for a three-dimensional memory device with specific concentrations of fluorine and hydrogen in the channel layer, as well as a method for forming the memory device. The method involves processes such as forming a channel structure within openings in alternating layers, depositing fluorine-containing layers, annealing to diffuse fluorine and hydrogen atoms, and selectively removing layers. The method also includes steps for passivating grain boundaries and interface traps in the polysilicon layer, as well as subsequent processes like memory hole fill and mold pull back to complete the memory device structure. Overall, the patent focuses on enhancing the performance and reliability of 3D memory devices through precise material deposition and annealing techniques.

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GlobalData, the leading provider of industry intelligence, provided the underlying data, research, and analysis used to produce this article.

GlobalData Patent Analytics tracks bibliographic data, legal events data, point in time patent ownerships, and backward and forward citations from global patenting offices. Textual analysis and official patent classifications are used to group patents into key thematic areas and link them to specific companies across the world’s largest industries.