Applied Materials had four patents in digitalization during Q1 2024. The patent filed by Applied Materials Inc in Q1 2024 relates to sensor devices with a substrate, first and second sensors of a first type with a catalytic layer, and a lid with an opening over the sensors. GlobalData’s report on Applied Materials gives a 360-degree view of the company including its patenting strategy. Buy the report here.

Applied Materials grant share with digitalization as a theme is 50% in Q1 2024. Grant share is based on the ratio of number of grants to total number of patents.

Recent Patents

Application: Radical sensor substrate (Patent ID: US20240035896A1)

The patent filed by Applied Materials Inc. describes sensor devices that include a substrate, a first sensor with a catalytic layer, a second sensor of the same type adjacent to the first sensor, and a lid with an opening over both sensors. The first sensor can be a temperature sensor, such as a thermocouple or thermopile, using resistance to measure temperature. The catalytic layer can be made of materials like platinum, copper, gold, or silver.

The patent also includes methods for determining and controlling process parameters in semiconductor processing recipes using these sensor devices. By inserting the sensors into a processing tool, temperature readings can be used to calculate radical density in a plasma. Additionally, artificial intelligence and machine learning models can be trained using sensor readings to adjust process parameters. The sensors can be various types, including temperature, pressure, deposition, etching thickness, or radical sensors, and the AI/ML models can be digital twins of the processing tool with physics-based models. Wireless communication can be used to provide sensor readings to the models for process control.

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GlobalData Patent Analytics tracks bibliographic data, legal events data, point in time patent ownerships, and backward and forward citations from global patenting offices. Textual analysis and official patent classifications are used to group patents into key thematic areas and link them to specific companies across the world’s largest industries.