Applied Materials had 86 patents in future of work during Q1 2024. The patents filed by Applied Materials Inc in Q1 2024 include methods and apparatus for cleaning tooling parts in a substrate processing tool, a workpiece mounting system with controllable emissivity for heat transfer, a method for robot motion planning in processing substrates, a system for collecting waste fluids in a fabrication facility, and a method for determining recommended substrate placement based on surface profile data. GlobalData’s report on Applied Materials gives a 360-degree view of the company including its patenting strategy. Buy the report here.
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Applied Materials grant share with future of work as a theme is 40% in Q1 2024. Grant share is based on the ratio of number of grants to total number of patents.
Recent Patents
Application: On-board cleaning of tooling parts in hybrid bonding tool (Patent ID: US20240096664A1)
The patent filed by Applied Materials Inc. describes methods and apparatus for cleaning tooling parts in a substrate processing tool. The method involves placing dirty tools on a holder in a bonding chamber, transferring the holder to a cleaning chamber, cleaning the tools, inspecting them, and transferring them back to the bonding chamber. The process includes drying the cleaned tools and can involve wet cleaning, plasma processes, or mechanical scrubbing. The system also allows for re-cleaning tools that fail inspection and includes various chambers for different cleaning and inspection processes.
The patent also includes claims for a method of cleaning dirty tools in a multi-chamber processing tool, a computer-readable medium with instructions for cleaning tools, and a multi-chamber processing tool itself. The tool includes various chambers for bonding, cleaning, drying, and inspection, as well as a transfer robot for moving substrates between chambers. The tool can handle different types of tools like picker, flipper, aligner, ejector, or placer tools, and the cleaning process can involve wet cleaning, plasma processes, or mechanical scrubbing. The inspection can be done using optical or infrared imaging, and the tool includes features like holders with pins to retain tools and the ability to dry tools using methods like spin drying, blow drying, baking, or vacuum evacuation.
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GlobalData Patent Analytics tracks bibliographic data, legal events data, point in time patent ownerships, and backward and forward citations from global patenting offices. Textual analysis and official patent classifications are used to group patents into key thematic areas and link them to specific companies across the world’s largest industries.
