Axcelis Technologies has developed an ion implantation system that can implant high charge state ions into a workpiece while minimizing trace metal contamination. The system selectively passes desired ions through a charge selector, ensuring only ions at the second charge state are implanted. GlobalData’s report on Axcelis Technologies gives a 360-degree view of the company including its patenting strategy. Buy the report here.

According to GlobalData’s company profile on Axcelis Technologies, 3D memory devices was a key innovation area identified from patents. Axcelis Technologies's grant share as of April 2024 was 59%. Grant share is based on the ratio of number of grants to total number of patents.

Ion implantation system for high charge state ions with minimal contamination

Source: United States Patent and Trademark Office (USPTO). Credit: Axcelis Technologies Inc

A recently granted patent (Publication Number: US11923169B2) discloses an ion implantation system designed to generate desired ions of a specific species while minimizing the presence of trace metal ions from a contaminant species. The system includes an ion source, extraction apparatus, mass analyzer, accelerator, charge stripping apparatus, and charge selector. By selectively passing only the desired ions at a specific charge state through the charge selector, the final ion beam produced contains minimal trace metal ions, ensuring the purity of the desired ions for implantation purposes.

Furthermore, the patent details the configuration of the ion implantation system, including the positioning of the charge stripping apparatus within the accelerator, the presence of multiple accelerator stages, and the use of an energy filter to further refine the final ion beam. The system is capable of handling various contaminant species, such as titanium and iron, while still producing a final ion beam with negligible trace metal ions. By incorporating elements like an angle corrector lens and a scanner for beam scanning, the system offers versatility and precision in ion implantation processes, making it a valuable innovation in the field of semiconductor manufacturing and material science.

To know more about GlobalData’s detailed insights on Axcelis Technologies, buy the report here.

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GlobalData Patent Analytics tracks bibliographic data, legal events data, point in time patent ownerships, and backward and forward citations from global patenting offices. Textual analysis and official patent classifications are used to group patents into key thematic areas and link them to specific companies across the world’s largest industries.