Entegris has been granted a patent for a method of applying a cured polymeric blanket coating onto a surface, specifically for use as an electrostatic chuck in semiconductor wafer processing. The method involves applying a solution coating of a radiation-curable polymer, exposing it to radiation to form a cured polymer coating, and then heating it to remove solvent. The heating process involves temperatures ranging from 150 to 400 degrees Celsius for at least 45 minutes. GlobalData’s report on Entegris gives a 360-degree view of the company including its patenting strategy. Buy the report here.

According to GlobalData’s company profile on Entegris, 3D memory devices was a key innovation area identified from patents. Entegris's grant share as of September 2023 was 50%. Grant share is based on the ratio of number of grants to total number of patents.

Method for applying blanket-coated polymeric coating to electrostatic chuck

Source: United States Patent and Trademark Office (USPTO). Credit: Entegris Inc

A recently granted patent (Publication Number: US11772127B2) discloses a method for applying a blanket-coated polymeric coating to the surface of an electrostatic chuck. The method involves several steps to achieve the desired coating.

Firstly, a solution containing a radiation-curable polymer is applied to the surface of the electrostatic chuck, creating a solution coating that covers the entire surface. The solution may consist of at least 75 weight percent organic solvent. The viscosity of the solution when applied to a ceramic surface should be in the range of 3 to 9 centipoise.

Next, the entire surface of the solution coating is exposed to radiation, which causes the formation of a radiation-cured polymer coating. The radiation-curable polymer used in the process can be a radiation-curable epoxy polymer. It is worth noting that the surface of the electrostatic chuck should be at a temperature below 30 degrees Celsius during the application of the solution.

After the radiation-cured polymer coating is formed, it is heated to an elevated temperature to remove the solvent from the coating. The heating process involves raising the temperature of the radiation-cured polymer coating to a range of 150 to 400 degrees Celsius for a minimum of 45 minutes.

The method also includes additional features such as applying the solution to the surface using multiple paths, with each path passing over the surface in an end-to-end direction. This ensures uniform coverage of the surface. The solution coating is applied at a thickness ranging from 3 to 5 microns.

The surface of the electrostatic chuck, to which the coating is applied, can consist essentially of ceramic. It may have a roughness in the range of 0.01 to 10 microns Ra. Additionally, the surface can have a specific structure, including a ceramic main field, ceramic protrusions extending vertically from the main field, and a continuous ceramic circumferential seal at the outer region of the main field.

In summary, the granted patent describes a method for applying a blanket-coated polymeric coating to the surface of an electrostatic chuck. The method involves applying a solution, exposing it to radiation, and heating the resulting coating to remove solvent. The process ensures uniform coverage and can be applied to ceramic surfaces with specific structures and roughness.

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GlobalData, the leading provider of industry intelligence, provided the underlying data, research, and analysis used to produce this article.

GlobalData Patent Analytics tracks bibliographic data, legal events data, point in time patent ownerships, and backward and forward citations from global patenting offices. Textual analysis and official patent classifications are used to group patents into key thematic areas and link them to specific companies across the world’s largest industries.