Entegris had two patents in advanced materials during Q4 2023. Entegris Inc filed a patent for a high pressure fluid storage device with an internal pressure sensing and regulating system designed for delivering vaporized solid and liquid precursor materials within a regulated pressure range. GlobalData’s report on Entegris gives a 360-degreee view of the company including its patenting strategy. Buy the report here.

Entegris grant share with advanced materials as a theme is 0% in Q4 2023. Grant share is based on the ratio of number of grants to total number of patents.

Recent Patents

Application: Pressure sensing and regulating system (Patent ID: US20230324933A1)

The patent filed by Entegris Inc. describes a high-pressure fluid storage device with a pressure sensing and regulating system that delivers vaporized solid and liquid precursor materials within a regulated pressure range. The pressure regulating system is contained internally within the storage device, ensuring efficient and precise control over the delivery of the fluid. The system includes an electromechanical valve with variable open states controlled by electric signals and pressure sensors that detect local pressure to generate the necessary control signals for the valve. Additionally, the system may include multiple valves, sensors, and a gas flow control device with a specialized algorithm for precise control based on data received from the sensors.

The system described in the patent claims allows for the flow of compressed fluid from a container to a delivery line at subatmospheric pressure levels. By utilizing pressure sensors with pressure-sensitive components such as piezoelectric crystals or flexible membranes, the system can accurately detect and control the pressure of the fluid flow. The inclusion of multiple valves, sensors, and a gas flow control device with a specialized algorithm enhances the precision and efficiency of the system, ensuring optimal delivery of the fluid to the desired destination. Overall, the patent outlines a sophisticated system for high-pressure fluid storage and delivery, with internal components designed to regulate pressure effectively and maintain the desired pressure range during operation.

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GlobalData Patent Analytics tracks bibliographic data, legal events data, point in time patent ownerships, and backward and forward citations from global patenting offices. Textual analysis and official patent classifications are used to group patents into key thematic areas and link them to specific companies across the world’s largest industries.