Lam Research had four patents in robotics during Q1 2024. Lam Research Corp filed a patent for a wafer bow measurement system that includes various sensors and actuators to accurately measure the bow of a wafer. Another patent filed by the company is for a robot system designed to service semiconductor tools, featuring a cart frame, arm support frame, robot arm, and locking mechanism for positioning the arm frame in extended or folded positions for docking with the semiconductor tool. GlobalData’s report on Lam Research gives a 360-degree view of the company including its patenting strategy. Buy the report here.
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Lam Research grant share with robotics as a theme is 25% in Q1 2024. Grant share is based on the ratio of number of grants to total number of patents.
Recent Patents
Application: Integrated wafer bow measurements (Patent ID: US20240094144A1)
The patent filed by Lam Research Corp describes a wafer bow measurement system integrated into a wafer processing tool. The system includes measurement units with optical sensors, calibration standards, linear stage actuators, wafer centering sensors, and wafer alignment sensors to measure and control the bow of the wafer during processing. The generated wafer bow values are used to adjust parameters of the treatment of the wafer's surface in the process chamber, ensuring precise processing based on the wafer's characteristics.
The measurement units in the wafer processing tool utilize optical sensors to perform 1-D or 2-D wafer scans, with additional components like linear stage actuators and wafer support assemblies for movement and rotation. The system can facilitate concentric wafer scans and measurements on the back side of the wafer, influencing the deposition of films based on the generated bow values. The wafer bow measurement is conducted before introducing the wafer into the process chamber, with the system feeding back second wafer bow values for controlling parameters of subsequent treatments, ensuring consistent and accurate processing throughout the wafer process flow.
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