Nova has been granted a patent for a system and method utilizing X-ray reflectance scatterometry to measure samples with periodic structures. The method involves directing X-rays through a transmissive region towards the sample, suppressing emitted electrons, and collecting the scattered X-ray beam for analysis. GlobalData’s report on Nova gives a 360-degree view of the company including its patenting strategy. Buy the report here.

According to GlobalData’s company profile on Nova, Pose estimation was a key innovation area identified from patents. Nova's grant share as of January 2024 was 48%. Grant share is based on the ratio of number of grants to total number of patents.

X-ray reflectance scatterometry method for measuring periodic structures

Source: United States Patent and Trademark Office (USPTO). Credit: Nova Ltd

A recently granted patent (Publication Number: US11874237B2) discloses a method and system for measuring a sample using X-ray reflectance scatterometry. The method involves directing an X-ray beam through a transmissive region towards a sample with a periodic structure, while suppressing emitted electrons using a magnetic electron suppression device. The scattered X-ray beam is then collected for analysis. The system includes a first sub-chamber, a second sub-chamber, an X-ray source, a sample holder, optics for focusing the X-ray beam, a magnetic electron suppression device, and a detector to collect the scattered X-ray beam.

The system further includes various components such as a window for the X-ray transmissive region, positioning of the magnetic electron suppression device above the X-ray beam, and the use of specific materials for the X-ray source's anode. Additionally, the system features a two-dimensional detector or a scanning slit detector, a monochromator or a toroidal multilayer monochromator in the optics, and a rotatable sample holder. The system is designed to analyze the scattered X-ray beam to estimate the shape of the periodic structure of the sample through inversion of scattering solutions. The processor in the system is configured to analyze multiple orders of the scattered X-ray beam for comprehensive data analysis. The magnetic electron suppression device is mechanically coupled to the top wall of the second sub-chamber via a mechanical interface for stability and efficiency in operation.

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GlobalData Patent Analytics tracks bibliographic data, legal events data, point in time patent ownerships, and backward and forward citations from global patenting offices. Textual analysis and official patent classifications are used to group patents into key thematic areas and link them to specific companies across the world’s largest industries.