Screen had three patents in robotics during Q2 2024. Screen Holdings Co Ltd filed a patent for a substrate processing device with multiple cleaning devices and a main robot for carrying substrates in and out of each device. The cleaning device includes a processing chamber with a brush cleaner for cleaning the substrate’s lower surface and a cleaning nozzle for discharging cleaning liquid. The supply of cleaning liquid is stopped during substrate carry-in and carry-out operations. GlobalData’s report on Screen gives a 360-degree view of the company including its patenting strategy. Buy the report here.
Screen had no grants in robotics as a theme in Q2 2024.
Recent Patents
Application: Substrate processing device and substrate processing method (Patent ID: US20240207900A1)
The patent filed by Screen Holdings Co Ltd describes a substrate processing device that includes cleaning devices and a main robot for carrying substrates in and out of the cleaning devices. The cleaning devices have a processing chamber with a brush cleaner to clean the lower surface of the substrate and a cleaning nozzle for brush cleaning liquid. The controller stops the supply of the cleaning liquid during substrate carry-in and carry-out operations. Additionally, the device includes a transport holder, a transport driver, and a brush mover to facilitate the cleaning process efficiently.
Furthermore, the patent outlines a substrate processing method involving holding the substrate with a first holder, cleaning the lower surface with a brush, and performing processing with a second holder. The method includes relative moving operations to switch between holders and stopping the supply of cleaning liquid during these movements. The patent also details a substrate cleaning method that involves moving the brush between cleaning and waiting positions, holding the substrate with different holders, and performing processing while controlling the supply of cleaning liquid. The method also includes adjusting the supply state of the cleaning liquid based on input conditions during processing.
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