Tokyo Electron had ten patents in advanced materials during Q4 2023. The semiconductor structure described in the patent includes first and second nanostructures arranged vertically, with a gate structure surrounding them. The gate structure consists of a first metal material, a ferroelectric material, and a second metal material, providing unique properties for semiconductor applications. GlobalData’s report on Tokyo Electron gives a 360-degreee view of the company including its patenting strategy. Buy the report here.

Tokyo Electron grant share with advanced materials as a theme is 30% in Q4 2023. Grant share is based on the ratio of number of grants to total number of patents.

Recent Patents

Application: 3d hybrid memory using horizontally oriented conductive dielectric channel regions (Patent ID: US20230337435A1)

The patent filed by Tokyo Electron Ltd. describes a semiconductor structure that includes first and second nanostructures extending along a lateral direction, with a gate structure surrounding them. The gate structure consists of a first metal material, a ferroelectric material, and a second metal material. The semiconductor structure also includes source/drain structures and a high-k dielectric material, with the components operating as a transistor and a capacitor connected in series.

Additionally, the patent outlines a method for fabricating these semiconductor structures, involving forming vertically spaced first and second nanostructures, exposing their middle portions, and wrapping them with the gate structure. The method also includes forming source/drain structures and utilizing materials such as indium oxide, tin oxide, and indium gallium zinc oxide for the nanostructures. The gate structure is crucial in providing functionality to the semiconductor structure, acting as a key component in the operation of the transistor and capacitor within the system.

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GlobalData, the leading provider of industry intelligence, provided the underlying data, research, and analysis used to produce this article.

GlobalData Patent Analytics tracks bibliographic data, legal events data, point in time patent ownerships, and backward and forward citations from global patenting offices. Textual analysis and official patent classifications are used to group patents into key thematic areas and link them to specific companies across the world’s largest industries.