Tokyo Electron had 29 patents in artificial intelligence during Q2 2024. Tokyo Electron Ltd filed patents related to abnormality detection in equipment using synthesized image data, adjusting processes based on object data, processing time series data from sensors in a substrate processing system, learning models for estimation based on feature values, and controlling substrate processing based on stored model data. GlobalData’s report on Tokyo Electron gives a 360-degree view of the company including its patenting strategy. Buy the report here.
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Tokyo Electron had no grants in artificial intelligence as a theme in Q2 2024.
Recent Patents
Application: Abnormality detection apparatus and abnormality detection method (Patent ID: US20240212130A1)
The patent filed by Tokyo Electron Ltd. describes an abnormality detection apparatus that includes a first generation part to generate pseudo-abnormal image data, a second generation part to create a determination model, an acquisition part to obtain image data, and a detection part to identify abnormalities in equipment based on the acquired image data using the determination model. The apparatus synthesizes circular images in normal image data to simulate abnormalities and uses machine learning to distinguish between normal and abnormal states, enabling efficient detection of equipment issues.
Furthermore, the patent outlines a method for abnormality detection involving the acquisition of image data from equipment with a liquid supply and detecting abnormalities using a determination model generated through learning from pseudo-abnormal image data. By synthesizing circular images in normal image data and applying machine learning techniques, the method enhances the accuracy and speed of identifying abnormalities in equipment, particularly those related to liquid supply systems. This innovative approach can significantly improve the reliability and effectiveness of abnormality detection processes in various industrial settings.
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