Applied Materials had one patents in edge computing during Q4 2023. The patent filed by Applied Materials Inc in Q4 2023 describes a substrate processing system with a processing chamber containing a susceptor with a groove and a substrate support structure with carrier lift pins movably disposed in openings recessed from the groove. GlobalData’s report on Applied Materials gives a 360-degreee view of the company including its patenting strategy. Buy the report here.
Smarter leaders trust GlobalData
Applied Materials grant share with edge computing as a theme is 0% in Q4 2023. Grant share is based on the ratio of number of grants to total number of patents.
Recent Patents
Application: Substrate transfer mechanism to reduce back-side substrate contact (Patent ID: US20230420279A1)
The patent filed by Applied Materials Inc. describes a substrate processing system with a processing chamber that includes a susceptor with a groove and a substrate support structure with carrier lift pins. The system is designed to efficiently regulate the temperature of substrates during processing. The chamber also includes stacked holders with curved inner portions and support members made of quartz material, along with a heating module and vent passages for laminar gas flow.
Additionally, the system involves a transfer chamber, a transfer chamber robot, and a factory interface loading station with a loading station robot for substrate transfer. The stacked holders are configured to support carriers made of ceramic material, and a lift mechanism controls their elevation within the chamber. The pedestal in the chamber has a heat transfer element sealed with a circular metallic over plate and passages for fluid flow. Locating pins and alignment pads are used to define the outer edge location of carriers and maintain proper alignment during processing, ensuring efficient and precise substrate processing within the system.
To know more about GlobalData’s detailed insights on Applied Materials, buy the report here.
Premium Insights
From
The gold standard of business intelligence.
Blending expert knowledge with cutting-edge technology, GlobalData’s unrivalled proprietary data will enable you to decode what’s happening in your market. You can make better informed decisions and gain a future-proof advantage over your competitors.
GlobalData, the leading provider of industry intelligence, provided the underlying data, research, and analysis used to produce this article.
GlobalData Patent Analytics tracks bibliographic data, legal events data, point in time patent ownerships, and backward and forward citations from global patenting offices. Textual analysis and official patent classifications are used to group patents into key thematic areas and link them to specific companies across the world’s largest industries.
