Comet has filed a patent for a switching circuitry used in plasma generation systems for semiconductor processing. The circuitry can also be used in telecom, plasma laser cutting, and RADAR/LIDAR applications. It includes isolated power supplies and multiple switching elements connected to reactive elements. The circuitry is inductively coupled to a main power supply. GlobalData’s report on Comet gives a 360-degree view of the company including its patenting strategy. Buy the report here.
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According to GlobalData’s company profile on Comet, was a key innovation area identified from patents. Comet's grant share as of September 2023 was 38%. Grant share is based on the ratio of number of grants to total number of patents.
Switching circuitry for variable reactance matching network
A recently filed patent (Publication Number: US20230317413A1) describes a switch circuit that includes multiple switching elements, reactive elements, and a main power supply. The switching elements receive an output signal from a controller, and each is connected to a respective reactive element. The main power supply is inductively coupled to individual isolated power supply loops, which are connected to the switching elements. The output signal from the controller is provided via a data bus, which can be an optical data bus. The switch circuit also includes optically isolated connections between the switching elements and the data bus.
The switching elements in the circuit can collectively receive a binary signal via the data bus. Each switching element includes drive circuitry, which consists of a rectifier, one or more filters, and an amplifier. The reactive elements in the circuit can be capacitors, inductors, resistors, or a combination of these components. Additionally, the switch circuit includes a main power loop with a primary coil powered by a power supply unit. The primary coil is inductively coupled to multiple secondary coils, each included in one of the individual isolated power supply loops.
The patent also describes a hybrid matching network that includes a multi-stage tunable matching network, a sensor, and a load. The first stage of the matching network is a switched matching network, and the second stage is a mechanically-tuned matching network. The sensor is connected between the two stages and determines the phase and magnitude of an electrical signal. The load is connected to the second stage. The first-stage switched matching network includes the same switch circuit as described earlier, with multiple switching elements, reactive elements, and a main power supply.
The output signal from the controller in the hybrid matching network is also provided via a data bus, and the switching elements can collectively receive a collection of binary signals via this bus. The drive circuitry for each switching element includes a rectifier, one or more filters, and an amplifier. The reactive elements in the network can be capacitors, inductors, resistors, or a combination of these components. Similar to the switch circuit, the hybrid matching network includes a main power loop with a primary coil and multiple secondary coils in individual isolated power supply loops.
Lastly, the patent describes a radio frequency plasma processing device that includes a reaction chamber, a radio frequency generator, a multi-stage tunable matching network, a sensor, and a load. The first-stage switched matching network in this device also includes the same switch circuit as described earlier, with multiple switching elements, reactive elements, and a main power supply. The output signal from the controller is provided via a data bus. The switching elements in the device include drive circuitry with a rectifier, one or more filters, and an amplifier. The switch circuit also includes a main power loop with a primary coil and multiple secondary coils in individual isolated power supply loops.
In summary, the patent describes a switch circuit, a hybrid matching network, and a radio frequency plasma processing device, all of which include a similar switch circuit with multiple switching elements, reactive elements, and a main power supply. The circuits and devices utilize a data bus for communication and include drive circuitry for the switching elements. The reactive elements can be capacitors, inductors, resistors, or a combination of these components. Additionally, the circuits include a main power loop with a primary coil and multiple secondary coils in individual isolated power supply loops.
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GlobalData Patent Analytics tracks bibliographic data, legal events data, point in time patent ownerships, and backward and forward citations from global patenting offices. Textual analysis and official patent classifications are used to group patents into key thematic areas and link them to specific companies across the world’s largest industries.
