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Showing 4 results out of 4
ASM International gets grant for method of depositing transition metal nitride on substrate
ASM International has been granted a patent for a method of depositing transition metal nitride-containing material on a substrate for...
ASM International gets grant for solid source chemical vaporizer with serpentine flow path and turbulence
ASM International has been granted a patent for systems and methods related to solid source chemical vaporizer vessels and multiple...
ASM International gets patent grant for solid source chemical sublimator with improved gas flow path
ASM International has been granted a patent for solid source chemical sublimator vessels and deposition modules. The invention includes a...
ASM International files patent for a gas distribution system with independent gas flow control
ASM International has filed a patent for a gas distribution system that can monitor and control gas flow rates in...