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Showing 4 results out of 4
ASML Holding gets grant for multi-beam apparatus for observing sample surface with high resolution
ASML Holding has developed a multi-beam apparatus for high-resolution observation of sample surfaces. The apparatus uses a charged particle source,...
ASML Holding gets grant for charged particle beam system for sample inspection
ASML Holding has been granted a patent for systems and methods implementing charged particle flooding in a charged particle beam...
ASML Holding gets patent grant for method of determining overlay value of a substrate using temperature data
ASML Holding has been granted a patent for a method of determining the overlay value of a substrate. The method...
ASML Holding files patent for electron-optical assembly with separable electromagnetic shielding for charged particle beam
ASML Holding has filed a patent for an electron-optical assembly that includes electromagnetic shielding to protect a charged particle beam...