Hitachi High-Technologies patented a charged particle beam device with an electron gun emitting a stable large current electron beam. The device includes a unique configuration with a shield electrode and insulator to ensure efficient operation. GlobalData’s report on Hitachi High-Technologies gives a 360-degree view of the company including its patenting strategy. Buy the report here.
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According to GlobalData’s company profile on Hitachi High-Technologies, was a key innovation area identified from patents. Hitachi High-Technologies's grant share as of February 2024 was 48%. Grant share is based on the ratio of number of grants to total number of patents.
Charged particle beam device with stable large current emission
A recently granted patent (Publication Number: US11929230B2) discloses a novel charged particle beam device featuring an electron gun with specific components and configurations. The device includes an electron gun with a tip, a suppressor, an extraction electrode, and an insulator holding these components. A conductive metal is positioned between the suppressor and the cylindrical portion of the extraction electrode, with a voltage lower than that of the tip applied to the metal. Additionally, the conductive metal and the suppressor may be integrally formed, and the extraction electrode may have openings or protrusions for enhanced functionality.
Furthermore, the patent describes variations of the charged particle beam device, such as different configurations of the conductive metal, the insulator material, and the radius of curvature of the tip. The device is designed to operate within a vacuum chamber evacuated by a non-evaporable getter pump, ensuring optimal performance. Another embodiment of the device includes a conductive supporting portion holding the suppressor, along with the previously mentioned components. The inclusion of specific features like a step on the insulator and a gap between the insulator and the extraction electrode further enhances the functionality and efficiency of the charged particle beam device. Overall, the patented invention introduces innovative elements to improve the performance and reliability of charged particle beam devices in various applications.
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GlobalData Patent Analytics tracks bibliographic data, legal events data, point in time patent ownerships, and backward and forward citations from global patenting offices. Textual analysis and official patent classifications are used to group patents into key thematic areas and link them to specific companies across the world’s largest industries.
