Onto Innovation has filed a patent for a substrate pre-aligner system that can detect and align substrates by analyzing a fiducial on the substrate. The system uses cameras to capture images of the substrate from different angles, allowing it to determine the location of the fiducial and other characteristics of the substrate. This technology enables higher throughput and accurate pre-alignment of substrates. GlobalData’s report on Onto Innovation gives a 360-degree view of the company including its patenting strategy. Buy the report here.
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According to GlobalData’s company profile on Onto Innovation, Defect detection models was a key innovation area identified from patents. Onto Innovation's grant share as of September 2023 was 62%. Grant share is based on the ratio of number of grants to total number of patents.
The patent filed is for a substrate pre-aligner system
A recently filed patent (Publication Number: US20230317490A1) describes an apparatus and method for detecting and pre-aligning a fiducial on a substrate to a predetermined location on a substrate holder. The apparatus includes at least one camera positioned over the substrate to capture multiple images of the top surface of the substrate. The hardware-based processor analyzes these images to determine the location of the substrate's edge, the characteristic dimension of the substrate, and the location of the fiducial. It also calculates the x-direction offset, y-direction offset, and theta-direction offset of the substrate from the predetermined location on the substrate holder.
The apparatus further includes a rotation stage that allows the substrate to be rotated at least 180 degrees from its original position on the substrate holder. This rotation enables the camera to capture unique views of the substrate at 0 degrees and 180 degrees, aiding in the determination of the fiducial's location.
The hardware-based processor utilizes a convolutional neural network to analyze the captured images and determine the fiducial's location on bonded substrates. It can also discern a substrate identification code located on the top surface of the substrate using optical character recognition.
Additionally, the apparatus can include a camera located below the substrate during the pre-alignment procedure, providing additional imaging capabilities.
The calculated offsets of the substrate from the predetermined location on the substrate holder can be transferred to a substrate-transfer robot or the substrate holder itself, allowing for precise relocation of the substrate.
The method described in the patent involves capturing unique images of the substrate's top surface using multiple cameras, processing these images to determine the fiducial's location, and calculating the offsets of the substrate from the predetermined location on the substrate holder. The method also includes rotating the substrate and using a convolutional neural network for analysis.
Overall, this patent presents an apparatus and method that utilize cameras and a hardware-based processor to accurately detect and pre-align a fiducial on a substrate, enabling precise positioning and alignment during manufacturing processes.
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GlobalData Patent Analytics tracks bibliographic data, legal events data, point in time patent ownerships, and backward and forward citations from global patenting offices. Textual analysis and official patent classifications are used to group patents into key thematic areas and link them to specific companies across the world’s largest industries.
