Onto Innovation has been granted a patent for an optical metrology device that performs multi-wavelength polarized confocal Raman spectroscopy. The device uses two light sources and dichroic beam splitters to combine and analyze Raman responses from a sample. This innovation enhances precision in material analysis. GlobalData’s report on Onto Innovation gives a 360-degree view of the company including its patenting strategy. Buy the report here.

According to GlobalData’s company profile on Onto Innovation, Defect detection models was a key innovation area identified from patents. Onto Innovation's grant share as of January 2024 was 62%. Grant share is based on the ratio of number of grants to total number of patents.

Optical metrology device for multi-wavelength polarized confocal raman spectroscopy

Source: United States Patent and Trademark Office (USPTO). Credit: Onto Innovation Inc

A recently granted patent (Publication Number: US11874229B2) discloses an optical metrology device for Raman spectroscopy. The device includes a first excitation source generating a light beam with a specific wavelength, a second excitation source generating another light beam with a different wavelength, and a dichroic beam splitter that reflects and transmits these light beams towards a sample. The device further comprises spectrometers to receive and analyze the Raman responses emitted from the sample in response to the different excitation sources. Additionally, the device includes polarizers, analyzers, and a chopper to control the transmission of light beams and trigger the spectrometers accordingly.

The patent also describes a method for Raman spectroscopy using the optical metrology device. The method involves generating and directing light beams towards a sample, receiving Raman responses from the sample, and spectrally measuring these responses using spectrometers. The method includes steps for separating the Raman responses, analyzing them with specific gratings, and utilizing polarizers, analyzers, and a chopper for precise control over the excitation sources and measurements. The method provides a detailed process for conducting Raman spectroscopy efficiently and accurately, showcasing the innovative features of the optical metrology device outlined in the patent.

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GlobalData Patent Analytics tracks bibliographic data, legal events data, point in time patent ownerships, and backward and forward citations from global patenting offices. Textual analysis and official patent classifications are used to group patents into key thematic areas and link them to specific companies across the world’s largest industries.