Screen has filed a patent for a substrate cleaning device that includes a movable cleaning brush and remover to transfer liquid before cleaning the substrate. The device aims to improve cleaning efficiency and effectiveness. GlobalData’s report on Screen gives a 360-degree view of the company including its patenting strategy. Buy the report here.

According to GlobalData’s company profile on Screen, Semiconductor fabrication robots was a key innovation area identified from patents. Screen's grant share as of January 2024 was 37%. Grant share is based on the ratio of number of grants to total number of patents.

Substrate cleaning device with movable brush and liquid remover

Source: United States Patent and Trademark Office (USPTO). Credit: Screen Holdings Co Ltd

A newly filed patent (Publication Number: US20240033782A1) describes a substrate cleaning device that includes a substrate holder, a cleaning brush, a remover, and a driver. The cleaning brush is movable between a cleaning position and a waiting position, with a cleaning surface capable of cleaning the substrate. The remover is configured to transfer liquid, and the driver moves the cleaning brush and remover relative to each other to transfer liquid adhering to the cleaning surface to the remover before cleaning the substrate. The device also includes a container for the cleaning brush, with the remover formed inside the container, and a sucker in the remover to remove liquid from the cleaning surface when they come close to each other.

Furthermore, the patent details a substrate cleaning method involving holding a substrate, cleaning it with the cleaning brush, and transferring liquid to the remover before cleaning the substrate. The method ensures efficient cleaning by maintaining a predetermined distance between the cleaning surface and the remover, with a detector and controller to control the driver based on the position detected. The remover is designed with a hydrophilic material surface and slits on the opposing surface for effective liquid transfer. Overall, the patent presents a novel substrate cleaning device and method that improve the cleaning process by efficiently transferring liquid from the cleaning surface to the remover before cleaning the substrate.

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GlobalData, the leading provider of industry intelligence, provided the underlying data, research, and analysis used to produce this article.

GlobalData Patent Analytics tracks bibliographic data, legal events data, point in time patent ownerships, and backward and forward citations from global patenting offices. Textual analysis and official patent classifications are used to group patents into key thematic areas and link them to specific companies across the world’s largest industries.