Sino-American Silicon Products has been granted a patent for a semiconductor wafer imaging system. The system includes shroud panels creating a black box, a camera for imaging the wafer, an illumination panel directing diffuse light, and a flat mirror reflecting light to the camera for imaging. GlobalData’s report on Sino-American Silicon Products gives a 360-degree view of the company including its patenting strategy. Buy the report here.

According to GlobalData’s company profile on Sino-American Silicon Products, Artificial photosynthesis was a key innovation area identified from patents. Sino-American Silicon Products's grant share as of February 2024 was 53%. Grant share is based on the ratio of number of grants to total number of patents.

Semiconductor wafer imaging system using diffuse light and mirror

Source: United States Patent and Trademark Office (USPTO). Credit: Sino-American Silicon Products Inc

A recently granted patent (Publication Number: US11921054B2) discloses a semiconductor wafer imaging system designed to image semiconductor wafers with precision. The system includes shroud panels that create a black box environment, a camera positioned within the black box to capture images of the wafer, an illumination panel for directing diffuse light onto the wafer, and a flat mirror to reflect the diffuse light back to the camera. This setup allows the camera to detect defects on the semiconductor wafer by analyzing the reflected diffuse light.

The system also features a controller for analyzing the images captured by the camera, black anodized aluminum panels within the shroud panels to minimize reflections, and specific chamber configurations for optimal light transmission. Additionally, the system includes components such as an end effector for wafer positioning, an end effector positioner for calibration, and various positioning systems for the camera and mirror. The patent also covers a standalone black box design for imaging semiconductor wafers, which includes similar components such as shroud panels, a camera, an illumination panel, and a flat mirror. This black box configuration ensures efficient light transmission and reflection for accurate imaging of semiconductor wafers.

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GlobalData Patent Analytics tracks bibliographic data, legal events data, point in time patent ownerships, and backward and forward citations from global patenting offices. Textual analysis and official patent classifications are used to group patents into key thematic areas and link them to specific companies across the world’s largest industries.