AAC Technologies has been granted a patent for a MEMS device with improved compliance performance and reduced risk of delamination. The device includes a diaphragm with first and second membranes, supports, and a counter electrode. Ventilation slots are provided for enhanced functionality. GlobalData’s report on AAC Technologies gives a 360-degree view of the company including its patenting strategy. Buy the report here.
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According to GlobalData’s company profile on AAC Technologies, V2V communication antennas was a key innovation area identified from patents. AAC Technologies's grant share as of January 2024 was 57%. Grant share is based on the ratio of number of grants to total number of patents.
Mems device with improved compliance performance and no delamination
A recently granted patent (Publication Number: US11889282B2) discloses a micro electro mechanical system (MEMS) device featuring a unique design. The device includes a substrate with a back cavity, a diaphragm covering the cavity composed of two membranes with an accommodating space between them, supports connecting the membranes, and a counter electrode. Ventilation slots are provided on the diaphragm, and the membranes have distinct regions - an electrode region and a semiconductor material region with conductive ions. The device also includes a bonding pad connected to an external circuit and conducting tracks avoiding the ventilation slots.
Furthermore, the MEMS device described in the patent includes additional features such as protrusions on the membranes connected by supports, through holes on the electrode region, and support members arranged concentrically with notches between sections. The design of the device allows for efficient operation and structural integrity, with the supports and membranes configured in a specific manner to enhance performance. These innovative features set this MEMS device apart from conventional designs, offering potential benefits in various applications where MEMS technology is utilized.
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GlobalData Patent Analytics tracks bibliographic data, legal events data, point in time patent ownerships, and backward and forward citations from global patenting offices. Textual analysis and official patent classifications are used to group patents into key thematic areas and link them to specific companies across the world’s largest industries.
