Advanced Micro-Fabrication Equipment has been granted a patent for a radio frequency electrode assembly for a plasma processing apparatus. The assembly includes features such as a base with fluid passages, an electrostatic chuck, a focus ring, and a heat conducting ring to adjust polymers distribution in the edge area of the substrate. GlobalData’s report on Advanced Micro-Fabrication Equipment gives a 360-degree view of the company including its patenting strategy. Buy the report here.
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According to GlobalData’s company profile on Advanced Micro-Fabrication Equipment, 3D memory devices was a key innovation area identified from patents. Advanced Micro-Fabrication Equipment's grant share as of January 2024 was 36%. Grant share is based on the ratio of number of grants to total number of patents.
Radio frequency electrode assembly for plasma processing apparatus
A recently granted patent (Publication Number: US11875970B2) discloses a radio frequency electrode assembly designed for a plasma processing apparatus. The assembly includes a base with a fluid passage, an electrostatic chuck for substrate support, a focus ring, and a heat conducting ring with a fluid passage for temperature control. The unique design allows for heat conduction between the heat conducting ring and focus ring, with varying distances along the perimeter of the fluid passage to optimize performance.
Furthermore, the patent details additional features such as a gap between the heat conducting ring and base, a thermal insulation material layer, a coupling ring, grounding ring, dielectric ring, and a flat bottom plate. These components work together to enhance the functionality and efficiency of the radio frequency electrode assembly. The patent also extends to a plasma processing apparatus incorporating the described electrode assembly, with gas intake means for reactant gas supply and further optimization of the fluid passage design for improved plasma processing performance.
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GlobalData Patent Analytics tracks bibliographic data, legal events data, point in time patent ownerships, and backward and forward citations from global patenting offices. Textual analysis and official patent classifications are used to group patents into key thematic areas and link them to specific companies across the world’s largest industries.
