Comet has been granted a patent for a method and apparatus that utilizes a variable gain algorithm to adjust a capacitor in an automatic RF impedance matching network. The system operates in closed-loop feedback control, applying different gains based on operating regions to achieve a critically damped response. GlobalData’s report on Comet gives a 360-degree view of the company including its patenting strategy. Buy the report here.
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According to GlobalData’s company profile on Comet, was a key innovation area identified from patents. Comet's grant share as of February 2024 was 36%. Grant share is based on the ratio of number of grants to total number of patents.
Variable gain algorithm for adjusting capacitor in rf impedance matching
A recently granted patent (Publication Number: US11923175B2) discloses a matching network for a plasma processing system that effectively adjusts the match tuning capacitor to optimize performance. The system includes a tuning motor controlled by a controller that receives measurements from the plasma processing system, determines factors based on these measurements, and calculates a gain setting to adjust the capacitance of the match tuning capacitor. By applying variable gain to the tuning motor, the system ensures that adjustments are neither over-damped nor under-damped within different regions of operation of the match tuning capacitor, thus enhancing the overall efficiency of the plasma processing system.
Furthermore, the patent details methods for determining variable gain settings based on different match regions of operation associated with the match tuning capacitor. By applying these variable gain settings to feedback signals from the matching network, the system can make precise adjustments to the match tuning capacitor in response to positive and negative errors within each match region of operation. This approach helps to avoid over-damped and under-damped adjustments of the tuning motor, ensuring optimal performance across various operational scenarios. Overall, the patented technology offers a sophisticated solution for fine-tuning the matching network in radio frequency plasma processing devices, enhancing their efficiency and effectiveness in plasma processing applications.
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GlobalData Patent Analytics tracks bibliographic data, legal events data, point in time patent ownerships, and backward and forward citations from global patenting offices. Textual analysis and official patent classifications are used to group patents into key thematic areas and link them to specific companies across the world’s largest industries.
