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Showing 4 results out of 4
Nova gets grant for x-ray reflectance scatterometry method for measuring periodic structures
Nova has been granted a patent for a system and method utilizing X-ray reflectance scatterometry to measure samples with periodic...
Nova gets grant for x-ray reflectance scatterometry method for measuring periodic structures
Nova has been granted a patent for a system and method utilizing X-ray reflectance scatterometry to measure samples with periodic...
Nova files patent for material composition or thickness determination of integrated circuit layer
Nova. has filed a patent for a method to determine properties of integrated circuit layers. By irradiating the IC and...
Nova gets grant for a SIMS system for semiconductor metrology and surface analysis
Nova has been granted a patent for a secondary ion mass spectrometry (SIMS) system that enables semiconductor metrology and surface...