SiTime has been granted a patent for a device with a MEMS resonator on a die, including a layer of degenerately doped silicon and a piezoelectric material layer. The resonator vibrates at a frequency with temperature-dependent characteristics, with a heating element to control the temperature. GlobalData’s report on SiTime gives a 360-degree view of the company including its patenting strategy. Buy the report here.
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Mems resonator device with heating element
A recently granted patent (Publication Number: US11916534B2) discloses a device comprising a microelectromechanical systems (MEMS) resonator with a layer of degenerately doped silicon and a piezoelectric material layer, designed to vibrate at a frequency with temperature-dependent characteristics. The device includes a heating element to regulate the temperature of the resonator, ensuring optimal performance. Additionally, the device features a temperature sensor and control circuitry to adjust the temperature affecting the resonator based on feedback from the sensor, maintaining it at a target setpoint temperature during operation.
Furthermore, the device incorporates a frequency modifying element to dynamically control the vibration frequency towards a target frequency. The resonator's structure, including degenerately doped silicon layers and a piezoelectric material layer, is meticulously designed to achieve specific temperature coefficient of frequency (TCF) values, ensuring stable operation across a wide temperature range. The device can be utilized in various applications, such as an oven-controlled oscillator (OCXO) integrated circuit, with external electrical contacts for clock signal output and control signal input, enabling precise frequency adjustments and calibration processes. Additionally, the device includes programmable storage for control parameters and heating control circuitry to optimize the resonator's performance based on the stored parameters, showcasing advanced temperature regulation and frequency tuning capabilities.
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GlobalData Patent Analytics tracks bibliographic data, legal events data, point in time patent ownerships, and backward and forward citations from global patenting offices. Textual analysis and official patent classifications are used to group patents into key thematic areas and link them to specific companies across the world’s largest industries.
