Tokyo Electron had ten patents in robotics during Q4 2023. The patents filed by Tokyo Electron Ltd in Q4 2023 focus on substrate processing apparatus with improved control mechanisms for efficient unloading and loading of objects, a method for adjusting processing time based on assigned adjustment values for substrates, and a parameter selection method for optimizing processing steps by selecting parameters with a significant impact on result data. GlobalData’s report on Tokyo Electron gives a 360-degreee view of the company including its patenting strategy. Buy the report here.
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Tokyo Electron grant share with robotics as a theme is 30% in Q4 2023. Grant share is based on the ratio of number of grants to total number of patents.
Recent Patents
Application: Substrate processing apparatus and transfer method (Patent ID: US20230420286A1)
The patent filed by Tokyo Electron Ltd. describes a substrate processing apparatus that includes a first and second placement chamber, a transfer robot, and a controller. The controller is configured to detect the position of an object on the transfer robot when unloading it from the first chamber, transfer it to a standby position in the first chamber, then to a standby position in the second chamber, and detect its position when loading it into the second chamber. The transfer speed is controlled based on these positions, allowing for efficient and accurate transfer of objects between chambers.
Additionally, the patent includes claims related to position detection sensors, controlling transfer speed based on position differences, feedback mechanisms for transfer speed adjustments, and the types of chambers and objects involved in the substrate processing apparatus. The apparatus can handle substrates or consumable parts like focus rings, cover rings, and upper electrodes. The method outlined in the patent ensures precise and controlled transfer of objects between chambers, enhancing the overall efficiency and reliability of substrate processing operations.
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GlobalData Patent Analytics tracks bibliographic data, legal events data, point in time patent ownerships, and backward and forward citations from global patenting offices. Textual analysis and official patent classifications are used to group patents into key thematic areas and link them to specific companies across the world’s largest industries.
