United Microelectronics has been granted a patent for a parallel-connected capacitor structure with multiple electrode layers conformally filling a trench in a substrate. The structure includes a dielectric layer, capacitor dielectric layer, and conductive plugs. The design allows for efficient and reliable capacitor performance. GlobalData’s report on United Microelectronics gives a 360-degree view of the company including its patenting strategy. Buy the report here.
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According to GlobalData’s company profile on United Microelectronics, Quantum dot devices was a key innovation area identified from patents. United Microelectronics's grant share as of February 2024 was 80%. Grant share is based on the ratio of number of grants to total number of patents.
Parallel-connected capacitor structure with multiple electrode layers in trench
A recently granted patent (Publication Number: US11929213B2) discloses a parallel-connected capacitor structure designed for efficient energy storage. The structure includes a substrate with a first dielectric layer on its top surface, a trench embedded in the substrate with a dielectric layer lining its sidewall and bottom, and multiple electrode layers filling the trench. These electrode layers, made of materials like copper and tungsten, are arranged in a specific order based on their proximity to the trench's sidewall. A capacitor dielectric layer separates the electrode layers, with conductive plugs connecting them to different terminals for electrical connection.
Furthermore, the patent details the inclusion of barriers, such as tantalum nitride or titanium nitride, between certain electrode layers and the substrate or capacitor dielectric layer. The structure's design allows for a high aspect ratio trench, between 2.5 and 30, and specific geometric configurations for the electrode layers, such as concentric rectangles or circles. With applications in semiconductor substrates, this parallel-connected capacitor structure offers a unique and efficient solution for energy storage needs, combining innovative design elements with practical functionality for various electronic devices and systems.
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GlobalData Patent Analytics tracks bibliographic data, legal events data, point in time patent ownerships, and backward and forward citations from global patenting offices. Textual analysis and official patent classifications are used to group patents into key thematic areas and link them to specific companies across the world’s largest industries.
