Applied Materials had 36 patents in robotics during Q4 2023. The patents filed by Applied Materials Inc in Q4 2023 include a substrate processing system with a susceptor and carrier lift pins, an electronic device manufacturing system with different substrate access ports, a method for diagnosing and correcting alignment issues in a processing chamber, a pump liner for process chambers to improve temperature and gas flow uniformity, and a system for calibrating robot arms to compensate for misalignment when transferring objects. GlobalData’s report on Applied Materials gives a 360-degreee view of the company including its patenting strategy. Buy the report here.

Applied Materials grant share with robotics as a theme is 47% in Q4 2023. Grant share is based on the ratio of number of grants to total number of patents.

Recent Patents

Application: Substrate transfer mechanism to reduce back-side substrate contact (Patent ID: US20230420279A1)

The patent filed by Applied Materials Inc. describes a substrate processing system with a processing chamber that includes a susceptor with a groove and a substrate support structure with carrier lift pins. The system also includes a pedestal with a heat transfer element to regulate substrate temperature, stacked holders with standoffs, and a transfer chamber robot for substrate transfer.

The chamber design includes features such as support members made of quartz, a heating module for substrate heating, vent and exhaust passages for gas flow control, and a lift mechanism for holder elevation control. The pedestal has passages for fluid flow, a circular metallic over plate for sealing the heat transfer element, and locating pins made of quartz to define carrier edge location. Additionally, alignment pads with shoulder portions and protrusions are used to ensure proper substrate positioning on the carrier.

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GlobalData, the leading provider of industry intelligence, provided the underlying data, research, and analysis used to produce this article.

GlobalData Patent Analytics tracks bibliographic data, legal events data, point in time patent ownerships, and backward and forward citations from global patenting offices. Textual analysis and official patent classifications are used to group patents into key thematic areas and link them to specific companies across the world’s largest industries.