ASML Holding has been granted a patent for systems and methods implementing charged particle flooding in a charged particle beam apparatus. The patent describes a charged particle beam system with adjustable apertures and a controller to control the beam in defocused and focused modes for sample inspection. GlobalData’s report on ASML Holding gives a 360-degree view of the company including its patenting strategy. Buy the report here.
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According to GlobalData’s company profile on ASML Holding, AI-assisted photolithography was a key innovation area identified from patents. ASML Holding's grant share as of February 2024 was 58%. Grant share is based on the ratio of number of grants to total number of patents.
Charged particle beam system for sample inspection
A recently granted patent (Publication Number: US11929232B2) discloses a charged particle beam system designed for inspecting samples with precision. The system includes an adjustable gun aperture and an adjustable column aperture that can be configured to different sizes to control the passage of the charged particle beam. A controller is utilized to adjust the apertures to specific sizes for different current levels, allowing the beam to flood a sample region in a defocused state before focusing on specific areas for inspection. The system operates in two modes, switching between defocusing and flooding the sample to focusing on specific regions for detailed examination. The method involves adjusting aperture sizes, controlling the system modes, and moving the sample to inspect various regions systematically.
Furthermore, the patent includes claims for a method and a non-transitory computer-readable medium storing instructions for operating the charged particle beam system. The method involves adjusting aperture sizes, flooding the sample region with charged particles, focusing on specific areas for inspection, and repeating the process for comprehensive sample analysis. Additionally, the computer-readable medium contains instructions for forming spots on the sample surface at different current levels, adjusting aperture sizes, and focusing the beam during the flooding process. The system's innovative design, with adjustable apertures and precise control mechanisms, allows for efficient and accurate sample inspection, making it a valuable tool for various scientific and industrial applications requiring high-resolution imaging and analysis.
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