Winbond Electronics has filed a patent for a manufacturing method of a semiconductor structure. The method involves forming active areas, a dielectric layer, and a patterned region with a cavity and dielectric region. Contact holes are formed to expose portions of the active areas, and metal layers are filled into the contact holes. The patent aims to improve the manufacturing process of semiconductor structures. GlobalData’s report on Winbond Electronics gives a 360-degree view of the company including its patenting strategy. Buy the report here.

According to GlobalData’s company profile on Winbond Electronics, Magnetic RAMs was a key innovation area identified from patents. Winbond Electronics's grant share as of September 2023 was 77%. Grant share is based on the ratio of number of grants to total number of patents.

Manufacturing method for a semiconductor structure

Source: United States Patent and Trademark Office (USPTO). Credit: Winbond Electronics Corp

A recently filed patent (Publication Number: US20230317520A1) describes a manufacturing method for a semiconductor structure. The method involves several steps to form active areas, dielectric layers, and contact holes. The method also includes the formation of a gate structure on one of the active areas. The patent claims that the method improves the efficiency and performance of semiconductor structures.

In more detail, the method begins by forming first active areas that define a cell region, as well as a second and third active area that define a peripheral region. A first dielectric layer is then formed on these active areas. A patterned region is created in the first dielectric layer, consisting of a cavity region surrounding a dielectric region corresponding to the second active area. A filling layer is then added to the cavity region, followed by a cap layer and a second dielectric layer.

Next, first contact holes and at least one second contact hole are formed, penetrating the layers mentioned above. The first contact holes expose a portion of the first active areas, while the second contact hole replaces the dielectric region and exposes a portion of the second active area. Metal layers are then filled into these contact holes.

The method also includes the formation of a gate structure on the third active area. Another patterned region is formed in the first dielectric layer, with a dielectric region corresponding to the gate structure. Before filling the cavity region, a first barrier layer is formed, and before adding the metal layers, a second barrier layer is formed in the contact holes.

The resulting semiconductor structure consists of first active areas defining a cell region, a second and third active area defining a peripheral region, and various dielectric and metal layers. The metal layers are electrically connected to the active areas and the second active area. The structure may also include a gate structure on the third active area.

Overall, this patent describes a manufacturing method and resulting semiconductor structure that aim to improve the efficiency and performance of semiconductor devices. The method involves precise formation of active areas, dielectric layers, and contact holes, as well as the addition of barrier layers and metal layers. The resulting structure provides electrical connections and improved functionality.

To know more about GlobalData’s detailed insights on Winbond Electronics, buy the report here.

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GlobalData Patent Analytics tracks bibliographic data, legal events data, point in time patent ownerships, and backward and forward citations from global patenting offices. Textual analysis and official patent classifications are used to group patents into key thematic areas and link them to specific companies across the world’s largest industries.