KLA has been granted a patent for a plasma lamp with a gas containment structure made of glass, allowing for the generation of plasma. The glass material is transparent to both pump laser illumination and plasma radiation, with an OH concentration distribution that varies across the glass wall. GlobalData’s report on KLA gives a 360-degree view of the company including its patenting strategy. Buy the report here.
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According to GlobalData’s company profile on KLA, Defect detection models was a key innovation area identified from patents. KLA's grant share as of January 2024 was 57%. Grant share is based on the ratio of number of grants to total number of patents.
Plasma lamp with glass structure for gas containment
A recently granted patent (Publication Number: US11887835B2) discloses a plasma lamp and a laser-sustained plasma light source with a unique gas containment structure made from a glass material that is partially transparent to laser illumination and plasma radiation. The glass wall of the gas containment structure contains varying OH concentrations, with the internal surface having a higher OH concentration than the bulk region, achieved through surface treatment or annealing processes. This design not only sustains plasma within the lamp but also inhibits surface degradation, enhancing the lamp's efficiency and longevity.
Furthermore, the patent also covers a characterization system incorporating the laser-sustained light source, along with a method for forming a plasma lamp by treating the internal surface of the glass wall to alter OH concentrations. By gradually varying the OH concentration through the bulk region of the glass wall, the plasma lamp's performance and durability are improved. The method involves coating or treating the glass wall with specific chemical precursors or subjecting it to annealing processes in the presence of water vapor. These innovations in plasma lamp design and manufacturing processes highlight advancements in lighting technology aimed at enhancing performance and longevity while maintaining efficiency.
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GlobalData Patent Analytics tracks bibliographic data, legal events data, point in time patent ownerships, and backward and forward citations from global patenting offices. Textual analysis and official patent classifications are used to group patents into key thematic areas and link them to specific companies across the world’s largest industries.
