Onto Innovation‘s patent involves a horizontal Dewar flask with a thermal transfer member for optical metrology devices, reducing vertical height. The member biases heat transfer to liquefied gas at the bottom of the chamber, compensating for evaporation. Projections provide increased surface area at the bottom for efficient heat transfer. GlobalData’s report on Onto Innovation gives a 360-degree view of the company including its patenting strategy. Buy the report here.

According to GlobalData’s company profile on Onto Innovation, Defect detection models was a key innovation area identified from patents. Onto Innovation's grant share as of February 2024 was 63%. Grant share is based on the ratio of number of grants to total number of patents.

Apparatus for transferring heat from liquefied gas cooled detector

Source: United States Patent and Trademark Office (USPTO). Credit: Onto Innovation Inc

A recently granted patent (Publication Number: US11913703B2) discloses an apparatus designed for transferring heat from a liquefied gas-cooled detector. The apparatus includes a horizontal Dewar flask with an internal chamber for holding liquefied gas, along with a thermal transfer member mounted to the flask. The thermal transfer member features projections that extend into the internal chamber, providing a larger surface area in direct contact with the liquefied gas at the bottom of the chamber. This configuration allows for the mounting of a liquefied gas-cooled detector on the thermal transfer surface of the member, enhancing heat transfer efficiency.

Furthermore, the apparatus includes various embodiments with different types of projections, such as vertically oriented fins, ridges, corrugations, pins, and cones. These projections are strategically located to bias thermal transfer to the liquefied gas at the bottom of the internal chamber, ensuring effective cooling of the detector. Additionally, the apparatus features a window mounted at the end of the Dewar flask to allow radiation to be received by the detector. Overall, the design of this apparatus aims to optimize heat transfer in liquefied gas-cooled detectors, particularly infrared radiation detectors, by maximizing surface contact with the cooling liquefied gas.

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GlobalData Patent Analytics tracks bibliographic data, legal events data, point in time patent ownerships, and backward and forward citations from global patenting offices. Textual analysis and official patent classifications are used to group patents into key thematic areas and link them to specific companies across the world’s largest industries.