Pioneer has been granted a patent for a wafer support pin lifting device. The device includes a support plate, slide block, and lifting pole for adjusting the position of support pins in a cavity. The pivotal connection between the lifting pole and slide block allows for precise control of the support plate’s orientation. GlobalData’s report on Pioneer gives a 360-degree view of the company including its patenting strategy. Buy the report here.
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According to GlobalData’s company profile on Pioneer, MPEG media transport processing was a key innovation area identified from patents. Pioneer's grant share as of May 2024 was 32%. Grant share is based on the ratio of number of grants to total number of patents.
Wafer support pin lifting device for cavity
A recently granted patent (Publication Number: US11990363B2) discloses a wafer support pin lifting device designed for use in a cavity. The device comprises a support plate for holding multiple support pins, a slide block connected to the cavity's inner wall for sliding movement, and a lifting pole with three ends - one connected to the support plate, one pivotally connected to the slide block, and one connected to an actuator for controlling vertical movement. The pivotal connection between the lifting pole and the slide block allows for the adjustment of the support plate's orientation, ensuring it can be horizontal or tilted as needed.
Furthermore, the device includes features such as a slide track on the cavity's inner wall for the slide block's movement, a connection arm on the lifting pole for pivotal connection to the slide block, and springs for applying biasing forces to control the support plate's position. The support plate, along with a carrier plate for holding a wafer, allows for the adjustment of the support pins to ensure the wafer remains horizontal when the support plate is in a high position and tilted when in a low position, facilitating the handling and processing of wafers in a manufacturing environment.
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