ASML Holding has filed a patent for an electron-optical assembly that includes electromagnetic shielding to protect a charged particle beam from external electromagnetic fields. The shielding is made up of separable sections arranged to create a gap in the shielding, with flanges on the facing surfaces of adjacent sections. This design allows for improved protection and flexibility in the assembly. GlobalData’s report on ASML Holding gives a 360-degree view of the company including its patenting strategy. Buy the report here.
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According to GlobalData’s company profile on ASML Holding, AI-assisted photolithography was a key innovation area identified from patents. ASML Holding's grant share as of September 2023 was 47%. Grant share is based on the ratio of number of grants to total number of patents.
Electron-optical assembly with separable electromagnetic shielding for charged particle beam
A recently filed patent (Publication Number: US20230317402A1) describes an electron-optical assembly for an electron-optical column used to project a charged particle beam towards a target. The assembly includes electromagnetic shielding that surrounds the charged particle beam path and protects it from external electromagnetic fields. The shielding is made up of multiple sections positioned along the beam path, with each section surrounding the beam path. These sections can be separated, creating a gap in the shielding between adjacent sections. The facing surfaces of the adjacent sections extend radially to the beam path and may include flanges.
The electron-optical assembly may also include electron-optical elements positioned between the sections. These elements can be manipulators, potentially arranged in an array. The electromagnetic shielding is designed to shield the charged particle beam from electric and/or magnetic fields and is made of a magnetically permeable material. The sections can be arranged so that at least one section is movable independently in a radial direction to the beam path. Additionally, some sections may have adjoining ends that electromagnetically engage with each other, either by being coaxially arranged or physically separate but electromagnetically engaged.
The patent also describes a module that includes an electron-optical device and electromagnetic shielding for the beam path. The shielding consists of an up-beam section and a down-beam section, with at least one of them having a flange extending radially to the beam path. The up-beam section's interface is designed for use with up-beam elements of the column and forms a facing surface. The module can be replaceable within the electron-optical column.
The patent further includes an electron-optical column that incorporates the described electron-optical assembly. The electromagnetic shielding is positioned radially inward of thermal conditioners, pumps, and electron optical elements like collimators or deflectors. Finally, a method is described for projecting a charged particle beam towards a target using the electron-optical assembly. The method involves shielding the beam from external electromagnetic fields using the separable sections of the electromagnetic shielding.
In summary, this patent presents an electron-optical assembly with electromagnetic shielding that can be separated into sections, allowing for flexibility and customization. The assembly includes electron-optical elements and is designed to protect the charged particle beam from external electromagnetic fields. The patent also describes a module and a method for using the assembly in an electron-optical column to project charged particle beams towards a target.
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GlobalData, the leading provider of industry intelligence, provided the underlying data, research, and analysis used to produce this article.
GlobalData Patent Analytics tracks bibliographic data, legal events data, point in time patent ownerships, and backward and forward citations from global patenting offices. Textual analysis and official patent classifications are used to group patents into key thematic areas and link them to specific companies across the world’s largest industries.
