Taiwan Semiconductor Manufacturing has been granted a patent for a method of generating a layout diagram for wire routing in a multi-patterning context. The method involves placing a cut pattern over a conductive pattern, determining if it violates a design rule, and temporarily preventing placement until a correction is made. The patent aims to improve the efficiency and accuracy of wire routing arrangements. GlobalData’s report on Taiwan Semiconductor Manufacturing gives a 360-degree view of the company including its patenting strategy. Buy the report here.

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According to GlobalData’s company profile on Taiwan Semiconductor Manufacturing, 3D memory devices was a key innovation area identified from patents. Taiwan Semiconductor Manufacturing's grant share as of September 2023 was 69%. Grant share is based on the ratio of number of grants to total number of patents.

Method for generating layout diagram of wire routing arrangement

Source: United States Patent and Trademark Office (USPTO). Credit: Taiwan Semiconductor Manufacturing Co Ltd

A recently granted patent (Publication Number: US11775727B2) describes a method for generating a layout diagram of a wire routing arrangement in a multi-patterning context with multiple masks. The method involves placing a given cut pattern at a candidate location over a corresponding portion of a conductive pattern in a metallization layer. The method then determines whether the candidate location violates a design rule by resulting in a non-circular group or a cyclic group. If a violation is detected, the placement of the cut pattern is temporarily prevented until a correction is made to avoid violating the design rule.

The method includes various scenarios for making corrections to

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GlobalData Patent Analytics tracks bibliographic data, legal events data, point in time patent ownerships, and backward and forward citations from global patenting offices. Textual analysis and official patent classifications are used to group patents into key thematic areas and link them to specific companies across the world’s largest industries.