Hitachi has developed a method for adjusting contrast and brightness of images obtained by scanning with a charged particle beam device. The system adjusts offset and gain of the signal processing device to achieve predetermined brightness values for different beam conditions, ensuring accurate image quality independent of sample state. GlobalData’s report on Hitachi gives a 360-degree view of the company including its patenting strategy. Buy the report here.
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According to GlobalData’s company profile on Hitachi, M2M communication interfaces was a key innovation area identified from patents. Hitachi's grant share as of May 2024 was 30%. Grant share is based on the ratio of number of grants to total number of patents.
Adjusting contrast and brightness of images obtained by charged particles
A recently granted patent (Publication Number: US12001521B2) outlines a method for adjusting the contrast and brightness of images obtained by scanning a sample with a charged particle beam. The method involves offset adjustment and gain adjustment of a signal processing device in the charged particle beam device to ensure that the brightness of patterns in different images obtained by scanning with different charged particle beams meets predetermined values. By performing these adjustments, the contrast and brightness of the images can be effectively controlled.
Furthermore, the patent describes a charged particle beam system that includes a deflector, a signal processing device, and a controller. The system is designed to scan a sample area with different beam conditions, evaluate image characteristics, and adjust the signal processing device accordingly. The controller can set different beam conditions, such as pulse beams with varying irradiation parameters, to achieve the desired image characteristics. Additionally, the system allows for repeated scanning and adjustment processes to ensure the brightness of patterns in the images meets specific predetermined values. Overall, this patented technology offers a comprehensive method and system for adjusting contrast and brightness in images obtained through charged particle beam scanning, enhancing the quality and accuracy of image inspection processes.
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