Applied Materials had 41 patents in robotics during Q2 2024. The patents filed by Applied Materials Inc in Q2 2024 include a device fabrication system with a mainframe, replaceable interface plates for process chambers, a system for detecting and addressing vibrations in a substrate transfer device, methods for measuring edge ring distance in thermal processing chambers, selective deposition of a silicon nitride trap layer for memory devices, and apparatus for bonding chiplets to substrates using a multi-chamber processing tool. GlobalData’s report on Applied Materials gives a 360-degree view of the company including its patenting strategy. Buy the report here.
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Applied Materials had no grants in robotics as a theme in Q2 2024.
Recent Patents
Application: Reconfigurable mainframe with replaceable interface plate having replaceable chamber ports (Patent ID: US20240213056A1)
The patent filed by Applied Materials Inc. describes a mainframe for a device fabrication system that includes a base, multiple facets, and a lid defining an interior volume with a robot arm. The mainframe features replaceable interface plates with chamber ports providing access to different process chambers, along with weight transfer features for load distribution and integration of a local center finder for substrate detection.
The mainframe also includes multiple robot arms, through holes for laser beam passage, and fiber optic cables for laser guidance. The replaceable interface plates are designed to withstand vertical forces due to pressure differences and can be easily detached and replaced to allow for the connection of different process chambers. The method outlined in the patent involves detaching and replacing chamber ports and interface plates to switch between various process chambers within the device fabrication system.
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GlobalData, the leading provider of industry intelligence, provided the underlying data, research, and analysis used to produce this article.
GlobalData Patent Analytics tracks bibliographic data, legal events data, point in time patent ownerships, and backward and forward citations from global patenting offices. Textual analysis and official patent classifications are used to group patents into key thematic areas and link them to specific companies across the world’s largest industries.
