ASM International has been granted a patent for a susceptor with a unique design including separate heaters for different portions of the plate part, a heat insulating portion, and a cooling device. The invention aims to improve thermal insulation and control in semiconductor processing. GlobalData’s report on ASM International gives a 360-degree view of the company including its patenting strategy. Buy the report here.
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According to GlobalData’s company profile on ASM International, 3D memory devices was a key innovation area identified from patents. ASM International's grant share as of May 2024 was 36%. Grant share is based on the ratio of number of grants to total number of patents.
Susceptor with separate heating zones and heat insulation
A recently granted patent (Publication Number: US12002661B2) discloses a unique susceptor design comprising a plate part with two heaters, each heating a different portion of the plate. The susceptor includes a heat insulating portion with a grooved section separating the heated areas, along with a cooling device positioned below the grooved portion to regulate temperature. The design also features closing parts to narrow the grooves without affecting the adjacent portions, ensuring precise control over the heating process.
Furthermore, the susceptor design incorporates a cooling device either attached to or embedded in the plate part, with specific configurations for the cooling medium passage to optimize heat transfer. The patent also details variations in the design, such as multiple sets of cooling passages and annular forms for the heaters, allowing for flexibility in application. Additionally, the susceptor can include a third heater for heating a different portion of the plate, showcasing versatility in temperature control across various sections of the susceptor. Overall, the patented susceptor aims to create a temperature difference between different portions of the plate surface, offering enhanced heating capabilities for specific applications.
To know more about GlobalData’s detailed insights on ASM International, buy the report here.
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GlobalData, the leading provider of industry intelligence, provided the underlying data, research, and analysis used to produce this article.
GlobalData Patent Analytics tracks bibliographic data, legal events data, point in time patent ownerships, and backward and forward citations from global patenting offices. Textual analysis and official patent classifications are used to group patents into key thematic areas and link them to specific companies across the world’s largest industries.
