Axcelis Technologies has patented a thermal electrostatic clamp apparatus that selectively clamps and heats different regions of a workpiece. The central electrostatic portion clamps and heats the central region, while the non-electrostatic peripheral portion heats the peripheral region without clamping. GlobalData’s report on Axcelis Technologies gives a 360-degree view of the company including its patenting strategy. Buy the report here.
Smarter leaders trust GlobalData
According to GlobalData’s company profile on Axcelis Technologies, 3D memory devices was a key innovation area identified from patents. Axcelis Technologies's grant share as of January 2024 was 53%. Grant share is based on the ratio of number of grants to total number of patents.
Thermal electrostatic clamp apparatus for workpiece heating and clamping
A recently granted patent (Publication Number: US11887808B2) discloses a thermal electrostatic clamp apparatus designed to securely hold and heat a workpiece. The apparatus consists of an electrostatic clamping member that can electrostatically clamp the central region of the workpiece while selectively heating it, along with a non-electrostatic member surrounding the periphery of the electrostatic clamping member. The non-electrostatic member is responsible for heating the peripheral region of the workpiece and is not involved in the electrostatic clamping process. The apparatus includes various heaters to control the temperature of different regions of the workpiece, with a controller and thermal monitoring devices ensuring precise temperature regulation.
The thermal electrostatic clamp apparatus described in the patent features a unique design where the central electrostatic portion is responsible for clamping and heating the central region of the workpiece, while the non-electrostatic peripheral portion focuses on heating the peripheral region. The use of different materials for the central and peripheral bodies, such as ceramics and graphite, silicon, or silicon carbide, adds to the versatility of the apparatus. Additionally, the inclusion of mechanical clamps for engaging the periphery of the workpiece provides added security during the heating process. Overall, the patent highlights an innovative approach to thermal clamping technology, offering precise control over heating different regions of a workpiece for various industrial applications.
To know more about GlobalData’s detailed insights on Axcelis Technologies, buy the report here.
Premium Insights
From
The gold standard of business intelligence.
Blending expert knowledge with cutting-edge technology, GlobalData’s unrivalled proprietary data will enable you to decode what’s happening in your market. You can make better informed decisions and gain a future-proof advantage over your competitors.
GlobalData, the leading provider of industry intelligence, provided the underlying data, research, and analysis used to produce this article.
GlobalData Patent Analytics tracks bibliographic data, legal events data, point in time patent ownerships, and backward and forward citations from global patenting offices. Textual analysis and official patent classifications are used to group patents into key thematic areas and link them to specific companies across the world’s largest industries.
