Data Insights
Axcelis Technologies gets grant for ion implantation system for high charge state ions with minimal contamination
Axcelis Technologies has developed an ion implantation system that can implant high charge state ions into a workpiece while minimizing...
Axcelis Technologies gets grant for thermal electrostatic clamp apparatus for workpiece heating and clamping
Axcelis Technologies has patented a thermal electrostatic clamp apparatus that selectively clamps and heats different regions of a workpiece. The...
Axcelis Technologies files patent for ion implantation system for forming aluminum ion beam with halide cleaning
Axcelis Technologies. has filed a patent for an ion implantation system that forms an aluminum ion beam using halide species...
Axcelis Technologies gets patent grant for an ion source assembly for ion implantation
Axcelis Technologies has been granted a patent for an ion source assembly and method that improves ion implantation performance. The...
Axcelis Technologies files patent for ion implantation system with mass analyzing magnet and beamline components
Axcelis Technologies has filed a patent for an ion implantation system that includes a mass analyzing magnet, two ion sources,...