Camtek has been granted a patent for a semiconductor inspection tool system. The system includes first and second illumination setups for directing radiation to bonding regions and multi-layer stack edges, along with a sensor unit for collecting reflected radiation and generating sensing data. GlobalData’s report on Camtek gives a 360-degree view of the company including its patenting strategy. Buy the report here.

According to GlobalData’s company profile on Camtek, Pose estimation was a key innovation area identified from patents. Camtek's grant share as of January 2024 was 36%. Grant share is based on the ratio of number of grants to total number of patents.

Semiconductor inspection tool system with multiple illumination setups

Source: United States Patent and Trademark Office (USPTO). Credit: Camtek Ltd

A semiconductor inspection tool system has been granted a patent (Publication Number: US11828713B1) that includes a first illumination setup to generate radiation directed at bonding regions in a multi-layer stack, a second illumination setup for illuminating stack edges with different parameters, and a bonding region sensor unit to collect reflected radiation and generate sensing data related to the bonding region. The system also includes edge top and bottom sensors, a processing unit for analyzing data from the sensors, and the ability to determine layer data, anomalies, or defects based on the analysis.

The patent further details the configuration of the illumination setups, with the first setup directed towards bonding regions and the second setup emitting omnidirectional or isotropic light to illuminate top or bottom bevels of layers. The system's processing unit is capable of analyzing sensing data and determining various parameters related to the layers, anomalies, or defects. Additionally, the illumination setups may include optical elements to direct or affect the illumination radiations, ensuring precise inspection capabilities for semiconductor manufacturing processes.

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GlobalData, the leading provider of industry intelligence, provided the underlying data, research, and analysis used to produce this article.

GlobalData Patent Analytics tracks bibliographic data, legal events data, point in time patent ownerships, and backward and forward citations from global patenting offices. Textual analysis and official patent classifications are used to group patents into key thematic areas and link them to specific companies across the world’s largest industries.