Data Insights
Lam Research gets grant for plasma processing device with dielectric window and air amplifier
Lam Research's patented plasma processing device includes a dielectric window, vacuum chamber, energy source, and air amplifier to enclose and...
Lam Research gets grant for method of forming ferroelectric hafnium oxide for feram memory
Lam Research has patented a method for forming ferroelectric hafnium oxide (HfO2) in a substrate processing system. The process involves...
Lam Research in artificial intelligence: theme innovation strategy
Lam Research had five patents in artificial intelligence during Q4 2023. The patent filed by Lam Research Corp in Q4...
Lam Research in future of work: theme innovation strategy
Lam Research had 19 patents in future of work during Q4 2023. The patents filed by Lam Research Corp in...
Lam Research in 3D printing: theme innovation strategy
Lam Research had three patents in 3D printing during Q4 2023. Lam Research Corp has developed a method for 3D...
Lam Research in robotics: theme innovation strategy
Lam Research had five patents in robotics during Q4 2023. Lam Research Corp filed a patent for a method of...
Lam Research gets grant for a heating device with a flexible serpentine shape
Lam Research has been granted a patent for a heating device that is bonded to tubing structures to form a...
Lam Research files patent on an apparatus for clean bevel edge and backside of substrate
Lam Research has filed a patent for an apparatus that performs a dry backside and bevel edge clean of a...