Data Insights
Showing 4 results out of 4
Onto Innovation gets grant for apparatus for transferring heat from liquefied gas cooled detector
Onto Innovation's patent involves a horizontal Dewar flask with a thermal transfer member for optical metrology devices, reducing vertical height....
Onto Innovation files patent for metrology apparatus for measuring substrate and film thicknesses
Onto Innovation. has filed a patent for a metrology apparatus that uses light to measure substrate and film thicknesses. The...
Onto Innovation files patent for a substrate pre-aligner system
Onto Innovation has filed a patent for a substrate pre-aligner system that can detect and align substrates by analyzing a...
Onto Innovation gets grant for method of correcting overlay errors in lithographic process
Onto Innovation has been granted a patent for systems and methods to correct overlay errors in the lithography process for...