Onto Innovation has patented systems and methods for inspecting samples by characterizing patterned features. The technology involves directing pump and probe beams to induce surface acoustic waves, detecting and analyzing reflected probe beams to determine patterned feature dimensions. GlobalData’s report on Onto Innovation gives a 360-degree view of the company including its patenting strategy. Buy the report here.
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According to GlobalData’s company profile on Onto Innovation, Defect detection models was a key innovation area identified from patents. Onto Innovation's grant share as of May 2024 was 41%. Grant share is based on the ratio of number of grants to total number of patents.
Method for characterizing patterned structures of a sample
A recently granted patent (Publication Number: US11988641B2) discloses a method for characterizing a patterned structure of a sample using a combination of pump beams and probe beams. By directing these beams at different distances on the sample's surface, surface acoustic waves are induced and detected, allowing for the identification of frequency modes that can determine the width or pitch of the patterned feature. The frequency modes analyzed fall within the range of 1 GHz to 50 GHz, with variations in distances between the beams affecting the characterization process. The method is particularly useful for analyzing patterned features like metal lines, even when embedded below the sample's surface, with widths as small as 200 nm.
Furthermore, the patent also describes a system designed for characterizing patterned structures in samples, comprising light sources, optical components, a detector, a processor, and memory storing instructions for analyzing frequency modes and determining the dimensions of the patterned structure. The system allows for precise characterization of features embedded under the sample's surface by controlling the distances between the beams and detecting reflected probe beams. By utilizing this method and system, manufacturers can gain valuable insights into the characteristics of patterned features, enabling them to make informed decisions and potentially optimize manufacturing processes for enhanced efficiency and accuracy.
To know more about GlobalData’s detailed insights on Onto Innovation, buy the report here.
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GlobalData Patent Analytics tracks bibliographic data, legal events data, point in time patent ownerships, and backward and forward citations from global patenting offices. Textual analysis and official patent classifications are used to group patents into key thematic areas and link them to specific companies across the world’s largest industries.
