Lam Research has patented a process cooling-water isolation system for process tools. The system includes an isolation valve, open and close devices, water-leak sensors, and a check valve to prevent water leaks and back-flow. This innovation enhances safety and efficiency in semiconductor manufacturing processes. GlobalData’s report on Lam Research gives a 360-degree view of the company including its patenting strategy. Buy the report here.
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According to GlobalData’s company profile on Lam Research, 3D memory devices was a key innovation area identified from patents. Lam Research's grant share as of May 2024 was 46%. Grant share is based on the ratio of number of grants to total number of patents.
Process cooling-water isolation system for process tools
A recently granted patent (Publication Number: US12002658B2) discloses a process cooling-water isolation system designed for use in a process tool. The system includes an isolation valve, open and dose devices, water-leak sensors, and a check valve to prevent back-flow. The water-leak sensors are strategically placed within the components of the water-cooling circuit to detect leaks, triggering the isolation valve to close and prevent further damage. Additionally, the system can be operated electrically, pneumatically, or hydraulically, offering flexibility in implementation. The components in the water-cooling circuit can be arranged in series, parallel, or a series-parallel arrangement, catering to different process tool configurations.
Furthermore, the patent details a method of operating the process cooling-water isolation system, involving monitoring for water leaks, shutting down the process tool upon detection, sounding an alarm, and closing the isolation valve to prevent further leakage. In the event of a leak, the method includes identifying the leak location and conducting repairs. A machine-readable storage medium storing instructions for these operations is also disclosed. The system's ability to prevent back-flow using a check valve adds an additional layer of protection to the process-module water-cooling circuit. Overall, the patent highlights a comprehensive approach to managing water leaks in process tools, ensuring efficient operation and minimizing potential damage.
To know more about GlobalData’s detailed insights on Lam Research, buy the report here.
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GlobalData, the leading provider of industry intelligence, provided the underlying data, research, and analysis used to produce this article.
GlobalData Patent Analytics tracks bibliographic data, legal events data, point in time patent ownerships, and backward and forward citations from global patenting offices. Textual analysis and official patent classifications are used to group patents into key thematic areas and link them to specific companies across the world’s largest industries.
