Applied Materials. has been granted a patent for a part coating reactor featuring a lower body and lid assembly that define an enclosed interior volume. The design includes heaters, coolant channels, independent gas passages, and mounting brackets for workpiece attachment, enhancing coating processing efficiency. GlobalData’s report on Applied Materials gives a 360-degree view of the company including its patenting strategy. Buy the report here.
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According to GlobalData’s company profile on Applied Materials, 3D memory devices was a key innovation area identified from patents. Applied Materials's grant share as of July 2024 was 48%. Grant share is based on the ratio of number of grants to total number of patents.
Part coating reactor with independent gas passage systems
The granted patent US12074010B2 describes a part coating reactor designed for efficient coating processes. The reactor consists of a lower body and a lid assembly that together create an enclosed interior volume. Key features include multiple heaters and coolant channels integrated into the lid assembly, which facilitate temperature control during operation. The reactor is equipped with a series of gas passages that incorporate fluidly independent plenums, allowing for the introduction of various gases into the interior volume. Each plenum is designed with multiple holes to ensure effective gas distribution, and the reactor also includes mounting brackets for securing workpieces. Additional components such as a thermostat for temperature monitoring and a fan for enhanced cooling are also part of the design.
Further enhancements to the reactor's functionality include a pedestal heater, a choke cup for regulating gas flow, and thermal conduction chokes to minimize heat loss. The design allows for the integration of a remote plasma source and features a liner to surround the workpiece, optimizing the coating process. The reactor's structure is carefully engineered, with specific dimensions and configurations to ensure efficient operation. The inclusion of multiple conduits for gas supply and the arrangement of plenums in an azimuthally symmetric manner contribute to the reactor's versatility in handling different gases. Overall, the patent outlines a comprehensive system aimed at improving the efficiency and effectiveness of part coating applications.
To know more about GlobalData’s detailed insights on Applied Materials, buy the report here.
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