ASM International has been granted a patent for systems and methods related to solid source chemical vaporizer vessels and multiple chamber deposition modules. The invention includes a housing base, trays with serpentine paths for solid source chemicals, and a housing lid with inlet and outlet valves for gas flow control. GlobalData’s report on ASM International gives a 360-degree view of the company including its patenting strategy. Buy the report here.
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According to GlobalData’s company profile on ASM International, 3D memory devices was a key innovation area identified from patents. ASM International's grant share as of February 2024 was 49%. Grant share is based on the ratio of number of grants to total number of patents.
Solid source chemical vaporizer with serpentine flow path and turbulence
The granted patent (Publication Number: US11926894B2) discloses a solid source chemical vaporizer designed with a housing base containing two trays, each defining a serpentine flow path for solid source chemicals and gas flow. The first tray includes protrusions within straight portions to induce turbulence during gas flow, enhancing the mixing process. The housing lid features inlet and outlet valves for each flow path, along with a vent valve for the first serpentine flow path. Additionally, the design allows for variations in the protrusion configuration, such as holes, hollow structures, or pillar-like protrusions, to optimize gas-solid interaction.
Furthermore, the patent details specific aspects of the design, such as the height-to-width aspect ratio of the serpentine flow path, the absence of protrusions near the outlet valve, and the spacing and frequency of protrusions along the flow path. The configuration of the protrusions, whether singular or multiple, aims to improve the efficiency of gas-solid mixing within the vaporizer. The patent also outlines different arrangements for connecting the two serpentine flow paths, either in series or parallel, or completely separate within the device. These features collectively contribute to a versatile and efficient solid source chemical vaporizer for various applications in the field.
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GlobalData Patent Analytics tracks bibliographic data, legal events data, point in time patent ownerships, and backward and forward citations from global patenting offices. Textual analysis and official patent classifications are used to group patents into key thematic areas and link them to specific companies across the world’s largest industries.
