Data Insights
Tokyo Electron in robotics: theme innovation strategy
Tokyo Electron had nine patents in robotics during Q1 2024. The patents filed by Tokyo Electron Ltd in Q1 2024...
Tokyo Electron in artificial intelligence: theme innovation strategy
Tokyo Electron had 23 patents in artificial intelligence during Q1 2024. Tokyo Electron Ltd filed patents in Q1 2024 for...
Tokyo Electron gets grant for heat treatment apparatus with independently moving shutters for cooling
Tokyo Electron has been granted a patent for a heat treatment apparatus with a vertically long process chamber, a heater,...
Tokyo Electron files patent for substrate support for plasma processing apparatus with electrostatic chuck
Tokyo Electron. has filed a patent for a substrate support in a plasma processing apparatus. The support includes a ceramic...
Tokyo Electron gets grant for plasma processing apparatus with periodic pulse bias voltage control
Tokyo Electron has patented a plasma processing apparatus with a unique power source system that applies varying bias voltages to...
Tokyo Electron in artificial intelligence: theme innovation strategy
Tokyo Electron had 13 patents in artificial intelligence during Q4 2023. The patents filed by Tokyo Electron Ltd in Q4...
Tokyo Electron in advanced materials: theme innovation strategy
Tokyo Electron had ten patents in advanced materials during Q4 2023. The semiconductor structure described in the patent includes first...
Tokyo Electron in future of work: theme innovation strategy
Tokyo Electron had 61 patents in future of work during Q4 2023. The patents filed by Tokyo Electron Ltd in...
Tokyo Electron in digitalization: theme innovation strategy
Tokyo Electron had six patents in digitalization during Q4 2023. The information processing apparatus by Tokyo Electron Ltd acquires specific...
Tokyo Electron in robotics: theme innovation strategy
Tokyo Electron had ten patents in robotics during Q4 2023. The patents filed by Tokyo Electron Ltd in Q4 2023...
Tokyo Electron in big data: theme innovation strategy
Tokyo Electron had three patents in big data during Q4 2023. The patent filed by Tokyo Electron Ltd in Q4...
Tokyo Electron gets grant for substrate transport system with adjustable duct arm mechanism
Tokyo Electron has been granted a patent for a substrate transport system that can transport substrates in a vacuum atmosphere....
Tokyo Electron files patent on method for selectively etching silicon layers in a substrate
Tokyo Electron has filed a patent for a method of processing a substrate in a plasma processing chamber. The method...