Everspin Technologies has been granted a patent for a method of manufacturing a magnetoresistive structure. The method involves etching through a second magnetic region, depositing an encapsulation layer, etching re-deposited material, and etching the intermediate layer. This process allows for the creation of a magnetoresistive stack with improved performance. GlobalData’s report on Everspin Technologies gives a 360-degree view of the company including its patenting strategy. Buy the report here.
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According to GlobalData’s company profile on Everspin Technologies, In-memory computing was a key innovation area identified from patents. Everspin Technologies's grant share as of September 2023 was 67%. Grant share is based on the ratio of number of grants to total number of patents.
Method of manufacturing a magnetoresistive structure with encapsulation layers
A recently granted patent (Publication Number: US11778919B2) describes a method for manufacturing a magnetoresistive structure with an intermediate layer between two magnetic regions. The method involves several steps to achieve the desired structure.
The first claim outlines the method, which includes etching through the second magnetic region to expose surfaces that may contain re-deposited material. A first encapsulation layer is then deposited on these exposed surfaces, followed by etching of the re-deposited material. Finally, the intermediate layer is etched.
Claim 2 specifies that one or more of the steps (a, b, or d) can involve an ion beam etch, while claim 3 adds that a physical etch can also be used in one or more of these steps.
Claim 4 introduces the addition of a second encapsulation layer, which can be deposited either before or after etching the intermediate layer. Furthermore, claim 6 states that the second encapsulation layer can have larger dimensions than the first encapsulation layer.
The composition of the encapsulation layers is addressed in claim 7, which states that they can be made of silicon oxide, silicon nitride, or tetraethylorthosilicate (TEOS), and that the first and second encapsulation layers can have different compositions.
The subsequent claims (8-20) describe an alternative method for manufacturing the magnetoresistive structure. This method follows a similar sequence of steps as outlined in the first claim, but with some variations in the order of deposition and etching processes.
Overall, this patent provides a detailed description of methods for manufacturing a magnetoresistive structure with an intermediate layer. The inclusion of encapsulation layers and the use of different etching techniques are key features of the described methods. These techniques may have potential applications in the field of magnetoresistive devices and could contribute to advancements in magnetic storage and sensing technologies.
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